Increase In Resonance Frequency Research Articles

Oxygen-termination effect on the surface energy dissipation in diamond MEMS

Single-crystal diamond (SCD) microelectromechanical systems (MEMS) resonators with lower energy dissipation and higher quality (Q) factors have always been pursued for the development of high-sensitivity and high signal-to-noise ratio (SNR) MEMS sensors. The intrinsic loss such as the crystal quality and extrinsic loss of clamping loss have been examined to improve the Q factors of SCD MEMS resonators. Nevertheless, the surface termination induced energy dissipation has rarely been known due to the lack of high crystal quality diamond resonators and in-situ characterization. Here we examine the effect of oxygen-termination on the surface energy dissipation of SCD cantilevers by in-situ heating these cantilevers in a high vacuum chamber. After thermal treatment of the cantilevers at 933 K, the Q factor of the cantilever is improved from 2.8x105 to 3.3x105 (i.e. the 120 μm-long). The resonance frequency increase confirms the desorption of surface adsorbates. Compared to silicon, on which a native solid-state oxide exists, the surface oxygen-termination induced loss in diamond MEMS is much smaller. The non-existence of native oxides on diamond surface is an obvious merit toward ultra-high Q factor MEMS resonators.

Modeling Nonlinear Dynamics of Functionalization Layers: Enhancing Gas Sensor Sensitivity for Piezoelectrically Driven Microcantilever.

This article presents a parametrized response model that enhances the limit of detection (LOD) of piezoelectrically driven microcantilever (PD-MC) based gas sensors by accounting for the adsorption-induced variations in elastic properties of the functionalization layer (binder) and the nonlinear motional dynamics of the PD-MC. The developed model is demonstrated for quantifying cadaverine, a volatile biogenic diamine whose concentration is used to assess the freshness of meat. At low concentrations of cadaverine, an increase in the resonance frequency is observed, contrary to the expected reduction due to mass added by adsorption. The study explores the variations in the elastic modulus vis-à-vis the adsorbed mass of cadaverine and derives the resonance frequency to the adsorbed mass response function. We advance a blended technique involving the analysis of atomic force microscopy (AFM) force-distance (f-d) curves and fitting of the quartz crystal microbalance (QCM) impedance response spectrum to deduce the adsorption-induced changes in the viscoelastic properties of the functionalization layer. The findings obtained are subsequently employed in modeling the response function for a structurally nonhomogenous PD-MC, highlighting the significance of the functionalization layer to the global elastic properties. The structural composition of the PD-MC beam adopted herein features a trapezoidal base hosting the actuating piezoelectric stratum and a rectangular free end with a functionalization layer. The Euler-Bernoulli beam theory coupled with Hamilton's principle is used to develop the equation of motion, which is subsequently discretized into a set of nonlinear ordinary differential equations via Galerkin expansion, and the solutions to the first fundamental mode of vibration are determined using the method of multiple scales. The obtained solutions provide a basis for deducing the nonlinear response function model to the adsorbed mass. The derived model is validated by recorded resonance frequency changes resulting from exposure to known concentrations of cadaverine. We demonstrate that the increase in resonance frequency for low concentrations of cadaverine is due to the dominance of the variation of the elastic modulus of the functionalization layer originating from the initial binder-analyte interactions over damping due to added mass. It is concluded that the developed nonlinear response function model can reliably be used to quantify the cadaverine concentration at low concentrations with an elevated Limit of Detection.

Modeling and Simulation of Graphene-Based Transducers in NEMS Accelerometers.

The mechanical characteristics of graphene ribbons with an attached proof mass that can be used as NEMS transducers have been minimally studied, which hinders the development of graphene-based NEMS devices. Here, we simulated the mechanical characteristics of graphene ribbons with an attached proof mass using the finite element method. We studied the impact of force, residual stress, and geometrical size on displacement, strain, resonant frequency, and fracture strength of graphene ribbons with an attached proof mass. The results show that the increase of width and thickness of graphene ribbons would result in a decrease of the displacement and strain but also an increase of resonant frequency. The increase of the length of graphene ribbons has an insignificant impact on the strain, but it could increase the displacement and decrease the resonant frequency. The increase of residual stress in the graphene ribbons decreases its strain and displacement. The estimated fracture strength of graphene shows limited dependence on its thickness, with an estimated value of around 148 GPa. These findings contribute to the understanding of the mechanical characteristics of graphene ribbons with an attached proof mass and lay the solid foundation for the design and manufacture of high-performance graphene-based NEMS devices such as accelerometers.

Numerical investigation of the effect of bubble properties on the linear resonance frequency shift due to inter-bubble interactions in ultrasonically excited lipid coated microbubbles

Ultrasonically excited microbubbles (MBs) have numerous applications in various fields, such as drug delivery, and imaging. Ultrasonically excited MBs are known to be nonlinear oscillators that generate secondary acoustic emissions in the media when excited by a primary ultrasound wave. The propagation of acoustic waves in the liquid is limited to the speed of sound, resulting in each MB receiving the primary and secondary waves at different times depending on their distance from the ultrasound source and the distance between MBs. These delays are referred to as primary and secondary delays, respectively. A previous study demonstrated that the inclusion of secondary delays in a model describing the interactions between MBs exposed to ultrasound results in an increase in the linear resonance frequency of MBs as they approach each other. This work investigates the impact of various MB properties on the change in linear resonance frequency resulting from changes in inter-bubble distances. The effects of shell properties, including the initial surface tension, surface dilatational viscosity of the shell monolayer, elastic compression modulus of the shell, and the initial radius of the MBs, are examined. MB size is a significant factor influencing the rate of linear resonance frequency increase with increasing concentration. Moreover, it is found that the shell properties of MBs play a negligible role in the rate of change in linear resonance frequency of MBs as the inter-bubble distances change.The findings of this study have implications for various applications of MBs in the biomedical field. By understanding the impact of inter-bubble distances and shell properties on the linear resonance frequency of MBs, the utilization of MBs in applications reliant on their resonant behavior can be optimized.

Thermo-electro-mechanical effects on nonlinear dynamics of smart dielectric elastomer minimum energy structures

Minimum energy structures made up of smart electro-active polymers (SEAPs) have attracted significant attention in the field of soft robotics and actuators due to their exceptional property of undergoing large deformations when subjected to electric fields. In general, temperature also plays a crucial role in modeling of SEAPs because it affects the mechanical, electrical, and thermal properties of the polymer. These properties, in turn, determine the performance of smart polymer-based devices. Motivated by these ongoing advancements, this study investigates the effects of temperature on the nonlinear dynamic behavior of a smart dielectric elastomer-based minimum energy structure (SDEMES) actuator. The governing dynamic equation of the actuator is derived using the standard Euler–Lagrange’s equation. Through the utilization of time-evolution diagrams, Poincaré plots, and phase portraits, the study comprehensively evaluates the effects of temperature on the stability, periodicity, and resonant behavior of the actuator. The results highlight the significant influence of temperature on the stiffness of the elastomer within the SDEMES actuator, directly impacting its actuation performance. The frequency response of the actuator demonstrates a distinct increase in resonant frequency as the temperature rises. These findings shed light on the crucial role of temperature in shaping the stiffness and nonlinear dynamic behavior of smart dielectric elastomer minimum energy structures.

Material model of thermally modified resonance spruce (Picea abies Karst.) for linear damped modal analysis

ABSTRACT Finite element analysis (FEA) was used in this research to determine the dynamic behaviour of thermally modified Norway spruce (Picea abies Karst.). Damped modal analysis was selected for this purpose. Data obtained from non-destructive experimental work and from the literature provided input for modal analysis. The material characteristics were optimised and validated by experimental measurement; then the validated material model was mathematically described and FEA was applied. This work resulted in a generally validated material model of modified spruce based on material constants at various modification temperatures and humidities. Good agreement with a relative error of up to 7.1% was found between the numerical model and the experimental data. It was found that thermal modification caused an increase in resonance frequencies and higher humidity caused a decrease. The data provided and the model could prove useful for the non-destructive evaluation of thermally modified spruce and for predicting the behaviour of materials used in making musical instruments.

Dynamics of interaction between IH and IKLT currents to mediate double resonances of medial superior olive neurons related to sound localization.

Neurons in the medial superior olive (MSO) exhibit high frequency responses such as subthreshold resonance, which is helpful to sensitively detect a small difference in the arrival time of sounds between two ears for precise sound localization. Recently, except for the high frequency depolarization resonance mediated by a low threshold potassium (IKLT) current, a low frequency hyperpolarization resonance mediated by a hyperpolarization-activated cation (IH) current is observed in experiments on the MSO neurons, forming double resonances. The complex dynamics underlying double resonances are studied in an MSO neuron model in the present paper. Firstly, double resonances similar to the experimental observations are simulated as the resting membrane potential is between half-activation voltages of IH and IKLT currents, and stimulation current (IZAP) with large amplitude and exponentially increasing frequency is applied. Secondly, multiple effective factors to modulate double resonances are obtained. Especially, the decrease of time constant of IKLT current and increase of conductance of IH and IKLT currents can enhance the depolarization resonance frequency for precise sound localization. Last, different frequency responses of slow IH and fast IKLT currents in formation of the resonances are acquired. A middle phase difference between IZAP and IKLT currents appears at a high frequency, and the interaction between the positive part of IZAP and the negative IKLT current forms the depolarization resonance. Interaction between the negative part of IZAP and positive IH current with a middle phase difference results in hyperpolarization resonance at a low frequency. Furthermore, the phase difference between IZAP and resonance current can well explain the increase of depolarization resonance frequency modulated by the increase of conductance of IH or IKLT currents. The results present the dynamical and biophysical mechanisms for the double resonances mediated by two currents in the MSO neurons, which is helpful to enhance the depolarization resonance frequency for precise sound localization.

Oscillometry of the respiratory system in Parkinson's disease: physiological changes and diagnostic use

BackgroundLung function analysis in Parkinson's disease (PD) is often difficult due to the demand for adequate forced expiratory maneuvers. Respiratory oscillometry exams require onlyquiet tidal breathing and provide a detailed analysis of respiratory mechanics. We hypothesized that oscillometry would simplify the diagnosis of respiratory abnormalitiesin PD and improve our knowledge about the pathophysiological changes in these patients.Materials and methodsThis observational study includes 20 controls and 47 individuals with PD divided into three groups (Hoehn and Yahr Scale 1–1.5; H&Y scale 2–3 and PD smokers).The diagnostic accuracy was evaluated by investigating the area under the receiver operating characteristic curve (AUC).ResultsInitial stages are related to increased peripheral resistance (Rp; p = 0.001). In more advanced stages, a restrictive pattern is added, reflected by reductions in dynamic compliance (p < 0.05) and increase in resonance frequency (Fr; p < 0.001). Smoking PD patients presented increased Rp (p < 0.001) and Fr (p < 0.01). PD does not introduce changes in the central airways. Oscillometric changes were correlated with respiratory muscle weakness (R = 0.37, p = 0.02). Rp showed adequate accuracy in the detection of early respiratory abnormalities (AUC = 0.858), while in more advanced stages, Fr showed high diagnostic accuracy (AUC = 0.948). The best parameter to identify changes in smoking patients was Rp (AUC = 0.896).ConclusionThe initial stages of PD are related to a reduction in ventilation homogeneity associated with changes in peripheral airways. More advanced stages also include a restrictive ventilatory pattern. These changes were correlated with respiratory muscle weakness and were observed in mild and moderate stages of PD in smokers and non-smokers. Oscillometry may adequately identify respiratory changes in the early stages of PD and obtain high diagnostic accuracy in more advanced stages of the disease.

Analysis of HepG2 cell response to a wide concentration range of mitomycin C using a multichannel quartz crystal microbalance system with a microscope

The morphological response of HepG2 cells to mitomycin C was analyzed using a multichannel quartz crystal microbalance system equipped with a home-built movable microscope that enables the simultaneous acquisition of cell images and measurements of eight-channel quartz crystal microbalance. After 24 h of cell seeding, mitomycin C was injected into the culture medium. During the attachment process, the resonant frequency decreased, and the curves fitted well with the first-order lag response. Analysis of the response to mitomycin C revealed that the resonant frequency response curves varied with mitomycin C concentration. When the mitomycin C concentration was <10 μmol L−1, the delay time was observed before the increase in resonant frequency. When the mitomycin C concentration was extremely low, an additional decrease in resonant frequency was observed in the middle of the delay time that fitted well with the cumulative log-normal distribution curve. The resonant frequency response curves after the delay time fitted well with the cumulative log-normal distribution curves. The delay time and mean cumulative log-normal distribution time for the increase in resonant frequency correlated with the mitomycin C concentration; however, the mean time for the additional decrease in the resonant frequency did not show a statistically significant difference as a function of mitomycin C concentration. For mitomycin C concentrations of >20 μmol L−1, the response to the change in resonant frequency was rapid, and the response curves fitted well with the first-order lag response. The first-order lag response indicates that the response occurred simultaneously for all cells. The results showed that the time constant was independent of the tested mitomycin C concentration between 20 and 100 μmol L−1. These results suggested that different cell death processes occurred by mitomycin C. The findings of this study suggest that the system can be used to investigate cell death in adherent cells.

Probing Relative Humidity Impact on Biological Protein Bovine Serum Albumin and Bovine Submaxillary Gland Mucin by Using Contact Resonance Atomic Force Microscopy.

In biomaterials, a substantial amount of research has been placed on the mechanical properties of biomolecules and their interactions with body fluids. Bovine serum albumin (BSA) is a widely studied model protein, while bovine submaxillary gland mucin (BSM) is another cow-derived protein frequently employed in research. Films were examined with contact resonance atomic force microscopy (CR-AFM), and the results showed that the mechanical characteristics of the films were affected by the relative humidity. We quantitatively analyze the viscoelasticity of these proteins after they have been subjected to humidity by measuring the resonance frequency and quality factor. The findings indicate that prolonged humidity exposure has a different effect on the mechanical properties of BSA and BSM films. The results show that after exposure to humidity, the resonance peaks of BSA shift to the left, indicating stiffness, while those of BSM shift to the right, indicating hydration. Moreover, BSM's hydration is caused by relative humidity, leading to a constant increase in resonance frequency and material softness. Contrarily, BSA showed a decrease in contact resonance frequency due to ongoing strain-induced deformation, indicating increased material stiffness. The findings have significance for the design and development of biomaterials for a variety of applications, such as the delivery of drugs, the engineering of tissue, and the development of biosensors. Our research demonstrates that CR-AFM has the potential to become a non-invasive and sensitive method that can be used to characterize the mechanical characteristics of biomolecules and their interactions with bodily fluids.

A Longitudinal Study of Respiratory Mechanics in Pregnant Women with Obesity and Overweight.

Respiratory mechanics and the role of sex hormones in pregnancy are not well elucidated. We examined longitudinal and positional changes in lung mechanics in pregnancy and investigated the role of sex hormones. A longitudinal study enrolled 135 women with obesity in early pregnancy. Fifty-nine percent of women identified as White; median body mass index at enrollment was 34.4kg/m2. Women with respiratory disease were excluded. We obtained measurements of airway resistance and respiratory system reactance in various positions using impedance oscillometry and sex hormones in early and late pregnancy. With pregnancy progression, there was a significant increase in resonant frequency (Fres) (p = 0.012), integrated area of low frequency reactance (AX) (p = 0.0012) and R5-R20Hz (p = 0.038) in the seated position,and a significant increase in R5Hz (p = 0.000), Fres (p = 0.001), AX (p < 0.001 = 0.000), and R5-R20Hz (p = 0.014) in the supine position. Compared to the seated position, the supine position was associated with a significant increase in R5Hz, R20Hz, X5Hz, Fres, and AX in early (p-values < 0.026) and late pregnancy (p-values ≤ 0.001). Changes in progesterone levels between early and late pregnancy predicted the change in R5, Fres, and AX (p-values ≤ 0.043). Resistive and elastic loads increase with pregnancy progression and a change in body position from seated to supine increases resistive and elastic loads in both early and late pregnancies. The increase in airway resistance is primarily related to an increase in peripheral rather than central airways resistance. There was an association between the change in progesterone levels and airway resistance.

Modelling of coupled magnetoelastic waves in structure containing thin antiferromagnetic films on an elastic substrate

In this work we present a model explaining the properties of magnetoelastic waves propagation in the heterostructure containing an antiferromagnetic layer on a non-magnetic elastic substate. Horizontally polarized shear surface waves (SH-waves) propagating in thin film are Love waves. The dispersion characteristic of magnetoelastic waves in such structure was obtained, and the effect of variation of the thickness of the antiferromagnetic layer and the external magnetic field on the frequency of the magnetoelastic resonance was also studied. It was found that an increase in the magnetic field magnitude leads to the increase in the magnetoelastic resonance frequency, and, on the contrary, with an increase in the thickness of the AFM layer the magnitude of the magnetoelastic resonance frequency decreases. The obtained results can be used to develop devices for generating and processing signals in the GHz and THz frequency ranges.

Performance analysis of inductive power transfer using JMAG-designer

Due to its advantage of sending electrical power from the transmitter source to the receiver load with no physical contact, wireless power transfer (WPT) has rapidly gained popularity in recent years. They can be used in a variety of applications, including induction cooking, mobile phone charging, radio frequency identification (RFID), and electric vehicles (EVs). Using JMAG-designer, a simulation of series-parallel inductive power transmission has been investigated in this research. This study aims to determine how the output power and efficiency change depending on how many coils turn in the transmitter and receiver. The number of coils turn in the transmitter is fixed which is 20 turns, the number of coils turn in the receiver is variable and ranges between 15 and 30, and the air gap or distance between the coupling coils is set at 10 cm. The selected frequency to be used in this simulation is between 10 and 50 kHz. According to the absorption result, the output power and efficiency rise when the receiver has more coil turns than the transmitter, and the output power and current rise along with an increase in resonance frequency.

A Seawater Conductivity Measurement Method Based on Magnetic Resonance Coupling

This paper proposes a magnetic resonance coupling seawater conductivity measurement method with a dual-coil structure. The passive transceiver coil is composed of two detection coils and capacitive elements placed in seawater. The seawater conductivity measurement is realized by analyzing the relationship between the transmission loss of the resonant magnetic field between the passive transceiver coils in the seawater and the seawater conductivity. In the article, the magnetic resonance coupling measurement method is established and analyzed, the circuit model of the magnetic resonance coupling measurement system transmitted in seawater is established, the experimental device is set up for laboratory testing, and the corresponding test situation is simulated by finite element electromagnetic modelling. The test and simulation results show that the measurement method is feasible; the system has the best performance at the resonant frequency, especially for low-conductivity conditions, and better sensitivity. In addition, the resonant frequency increases, and the conductivity resolution of the measurement system for seawater increases.

Dynamic response of high-power ultrasonic system based on finite element modeling of piezoelectric

In this study, a new finite element model for ultrasonic welding equipment is proposed. This help to solve remaining issues such as element type selection for the numerical model, mesh size, and how to determine the parameters of piezoelectric materials. The obtained results clearly show the influence of element type and mesh size on resonance frequency and amplitude. Specifically, with a mesh size of 2 mm, it was concluded to be suitable for the model. For the C3D8 element (C3D8E), the computation time is reduced by 0.25 times compared to the C3D20R element (C3D20RE). After that, an experimental processing procedure is performed to evaluate the numerical simulation results. Specifically, the handling of signal noise when measuring a very small displacement at high frequencies of an ultrasonic vibrating device. Based on the confirmed finite element model, this model is extended to evaluate the influence of the load on the amplitude and resonant frequency of the ultrasonic welding system. The results show that when the load increases, the amplitude decreases while the resonant frequency increases. The results of this study can be applied to the design of ultrasonic vibration systems.

Piezoelectric Lateral-Extensional Mode Resonators With Reconfigurable Electrode and Resonance Mode-Switching Behavior Enabled by a VO₂ Thin-Film.

This article presents the first two-port lateral-extensional mode zinc oxide (ZnO) piezoelectric resonator with a reconfigurable bottom electrode that is enabled by embedding a vanadium dioxide (VO2) thin film. The insulator-to-metal phase transition of VO2 is triggered by substrate heating that translates to abrupt changes in electric field patterns and piezoelectrically transduced modal vibrations, thus allowing mode-switching of piezoelectric resonators at specific frequencies. Finite element method (FEM) analysis was used to model the broadband frequency response, while frequency characteristics of the corresponding two-port resonator were measured over a temperature range between 20 °C and 95 °C with a specific focus on two resonances at 88 and 148 MHz. By leveraging the hysteretic behavior of VO2 thin film during a heating/cooling cycle, a change in both the capacitive feedthrough and resonance signal levels was observed, due to the abrupt change in the conductivity of VO2 during its phase transition. The unique switch- ON behavior of the resonance at 88 MHz starts at 70 °C during the heating cycle, while the switch- OFF transition begins at 60 °C during the cooling cycle. On the other hand, when the temperature is increased from 20 °C to 60 °C, a decrease in the insertion loss and resonance frequency of 12 dB and 0.28 MHz, respectively, were observed for the resonance at 148 MHz. Meanwhile, a resonance frequency increase of 0.42 MHz was observed during a temperature increase from 60 °C to 95 °C, which can be ascribed to VO2 phase transition from monoclinic to rutile phase. The hysteresis loops for insertion loss and resonance frequency indicate a different critical temperature for phase transition from the monoclinic (insulator) phase and rutile (metallic) phase and vice versa. The substantial variation in the temperature coefficient of frequency can be largely ascribed to electrode reconfiguration enabled by VO2 phase transition.

Dislocation-Induced Energy Dissipation in a Tunable Trilayer Graphene Resonator

In crystalline materials, the creation and modulation of dislocations are often associated with plastic deformation and energy dissipation. Here we report a study on the energy dissipation of a trilayer graphene ribbon resonator. The vibration of the ribbon generates cyclic mechanical loading to the graphene ribbon, during which mechanical energy is dissipated as heat. Measuring the quality factor of the graphene resonator provides a way to evaluate the energy dissipation. The graphene ribbon is integrated with silicon micro actuators, allowing its in-plane tension to be finely tuned. As we gradually increased the tension, we observed, in addition to the well-known resonance frequency increase, a large change in the energy dissipation. We propose that the dominating energy dissipation mechanism shifts over three regions. With small applied tension, the graphene is in elastic region, and the major energy dissipation is through graphene edge folding; as the tension increases, dislocations start to develop in the sample to gradually dominate the energy dissipation; finally, at large enough tension, graphene layers become decoupled and start to slide and cause friction, which induces the more severe energy dissipation. The generation and modulation of dislocations are modeled by molecular dynamics calculation and a method to count the energy loss is proposed and compared to the experiment.

Molecular Dynamics Analysis of Graphene Nanoelectromechanical Resonators Based on Vacancy Defects.

Due to the limitation of graphene processing technology, the prepared graphene inevitably contains various defects. The defects will have a particular influence on the macroscopic characteristics of the graphene. In this paper, the defect-based graphene nanoresonators are studied. In this study, the resonant properties of graphene were investigated via molecular dynamic simulations. The effect of vacancy defects and hole defects at different positions, numbers, and concentrations on the resonance frequency of graphene nanoribbons was studied. The results indicated that single monatomic vacancy has no effect on graphene resonant frequency, and the concentration of the resonant frequency of graphene decreases almost linearly with the increase of single-atom vacancy concentration. When the vacancy concentration is 5%, the resonance frequency is reduced by 12.77% compared to the perfect graphene. Holes on the graphene cause the resonance frequency to decrease. As the circular hole defect is closer to the center of the graphene nanoribbon, not only does its resonant frequency increase, but the tuning range is also expanded accordingly. Under the external force of 10.715 nN, the resonant frequency of graphene reaches 429.57 GHz when the circular hole is located at the center of the graphene nanoribbon, which is 40 GHz lower than that of single vacancy defect graphene. When the circular hole is close to the fixed end of graphene, the resonant frequency is 379.62 GHz, which is 90 GHz lower than that of single vacancy graphene. When the hole defect is at the center of nanoribbon, the frequency tunable range of graphene reaches 120 GHz. The tunable frequency range of graphene is 100.12 GHz when the hole defect is near the fixed ends of the graphene nanoribbon. This work is of great significance for design and performance optimization of graphene-based nanoelectro-mechanical system (NEMS) resonators.

Influences of Parameter Deviation on the Vibration Isolation System of an End Effector

The vibration problem influences the precision of the equipment. However, some vibration isolation systems (VISs) with the perfect theoretical and simulation results are still unable to suppress the vibration well, resulting in the damage during the operation, such as the phenomenon of fragments for the end effector of a glass substrate handling robot. Therefore, this paper focuses on the glass substrate handling robot in actual production and simplifies the VIS into a 2D (2 degree) system. From the analysis of the deviation of material parameters and installation deviations between vibration isolators, this paper concludes that, as long as there is a deviation, the vibration isolation performance of the system will be reduced. Through the mutually verified theory, simulation, and experimental structure, this paper also presents that the resonance frequency increase factor of the vibration isolation system is approximately the deviation. As for the end effector, the distance of the two vibration isolations is 579.4 mm. The change of the load does not change the isolation frequency of the same system, but the resonance amplitude will increase. The results of this study can supervise the installation and selection of vibration isolators in VISs. At the same time, the reasons for the weak vibration isolation performance of some systems are explained.

Analysis and Enhancement of Q-Factor in Thin-Film Bulk Acoustic Wave Resonator (FBAR)

In MEMS technology, MEMS Resonators has shown high potential applications in wireless communications such as Bluetooth and WIFI range. The Bulk Acoustic Wave (BAW) Resonator is a device which has more potential to meet the needs of today’s wireless technology. The Acoustic wave technology has attracted more attention and it’s an effective solution for achieving high-performance RF filters applications due to its low cost and small size of the device. The performance analysis of thin film bulk acoustic resonator (FBAR) by varying different piezoelectric material, piezoelectric material’s thickness and electrode materials is demonstrated in this paper. It is understood that the Quality factor is considerable higher for AlN as compared to ZnO and LiNbO3. Among all the materials, Aluminium electrode achieved maximum quality factor. As the thickness of piezo material decreases, it is found that the resonant frequency and Quality factor increases. Along with the Quality Factor, the top and bottom electrode thickness has a significant impact on the resonant frequency.